A temperature compensated 1.5 GHz FBAR-based frequency reference implemented in a 0.35 mum CMOS process is presented. The ultra-small form factor and low power dissipation of a temperature compensated ...

This paper describes a novel high-tone bulk acoustic resonator (HBAR) integrated with a surface micromachined FBAR (film bulk acoustic resonator) filter on sapphire substrate. The single-mode HBAR ...